{"id":351776,"date":"2024-06-22T07:09:10","date_gmt":"2024-06-22T06:09:10","guid":{"rendered":"https:\/\/www.thermal-engineering.org\/%ec%8b%a4%eb%9e%80-%ea%b0%80%ec%8a%a4-%eb%b0%98%eb%8f%84%ec%b2%b4-%ec%a0%9c%ec%a1%b0%ec%99%80-%ec%97%b4-%ec%9d%91%ec%9a%a9\/"},"modified":"2024-06-22T07:09:10","modified_gmt":"2024-06-22T06:09:10","slug":"%ec%8b%a4%eb%9e%80-%ea%b0%80%ec%8a%a4-%eb%b0%98%eb%8f%84%ec%b2%b4-%ec%a0%9c%ec%a1%b0%ec%99%80-%ec%97%b4-%ec%9d%91%ec%9a%a9","status":"publish","type":"post","link":"https:\/\/www.thermal-engineering.org\/ko\/%ec%8b%a4%eb%9e%80-%ea%b0%80%ec%8a%a4-%eb%b0%98%eb%8f%84%ec%b2%b4-%ec%a0%9c%ec%a1%b0%ec%99%80-%ec%97%b4-%ec%9d%91%ec%9a%a9\/","title":{"rendered":"\uc2e4\ub780 \uac00\uc2a4 | \ubc18\ub3c4\uccb4 \uc81c\uc870\uc640 \uc5f4 \uc751\uc6a9"},"content":{"rendered":"<p class=\"sidekick\">\uc2e4\ub780 \uac00\uc2a4\ub294 \ubc18\ub3c4\uccb4 \uc81c\uc870 \ubc0f \uc5f4 \uc751\uc6a9\uc5d0\uc11c \uc911\uc694\ud55c \uc5ed\ud560\uc744 \ud558\ub294 \uace0\uc21c\ub3c4 \uc2e4\ub9ac\ucf58 \uacf5\uae09\uc6d0\uc73c\ub85c, \uc8fc\ub85c \ud654\ud559 \uae30\uc0c1 \uc99d\ucc29(CVD) \uacf5\uc815\uc5d0\uc11c \uc0ac\uc6a9\ub429\ub2c8\ub2e4, \ubd88\uc548\uc815\ud558\uace0 \ub3c5\uc131\uc774 \uac15\ud569\ub2c8\ub2e4.<\/p>\n<p><img src=\"https:\/\/www.thermal-engineering.org\/wp-content\/uploads\/2024\/06\/\uc2e4\ub780_\uac00\uc2a4_\ubc18\ub3c4\uccb4_\uc81c\uc870\uc640_\uc5f4_\uc751\uc6a9.png\" alt=\"\uc2e4\ub780 \uac00\uc2a4 | \ubc18\ub3c4\uccb4 \uc81c\uc870\uc640 \uc5f4 \uc751\uc6a9\" style=\"display: block; margin-left: auto; margin-right: auto;\"\/><\/p>\n<h2>\uc2e4\ub780 \uac00\uc2a4 | \ubc18\ub3c4\uccb4 \uc81c\uc870\uc640 \uc5f4 \uc751\uc6a9<\/h2>\n<p>\uc2e4\ub780(SiH<sub>4<\/sub>)\uc740 \ubc18\ub3c4\uccb4 \uc81c\uc870\uc5d0\uc11c \uc911\uc694\ud55c \uc5ed\ud560\uc744 \ud558\ub294 \uac00\uc2a4 \uc911 \ud558\ub098\uc785\ub2c8\ub2e4. \uc2e4\ub780 \uac00\uc2a4\ub294 \uc2e4\ub9ac\ucf58 \uc6d0\uc790\ub97c \ud3ec\ud568\ud558\uace0 \uc788\uc73c\uba70, \uc774\uac83\uc774 \ub2e4\uc591\ud55c \ubc18\ub3c4\uccb4 \uc18c\uc790\uc758 \ud575\uc2ec \uc7ac\ub8cc\ub85c \uc0ac\uc6a9\ub429\ub2c8\ub2e4. \uc2e4\ub780 \uac00\uc2a4\ub294 \uc8fc\ub85c \ud654\ud559 \uae30\uc0c1 \uc99d\ucc29(CVD) \uacf5\uc815\uc5d0\uc11c \uc0ac\uc6a9\ub418\uba70, \uc774 \uacf5\uc815\uc744 \ud1b5\ud574 \uc587\uc740 \uc2e4\ub9ac\ucf58 \uce35\uc744 \ud615\uc131\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<h2>\uc2e4\ub780 \uac00\uc2a4\uc758 \ud2b9\uc9d5<\/h2>\n<ul>\n<li>\ud654\ud559\uc2dd: SiH<sub>4<\/sub><\/li>\n<li>\ubb3c\ub9ac\uc801 \uc0c1\ud0dc: \uae30\uccb4<\/li>\n<li>\ubb34\uc0c9, \ub3c5\uc131\uc774 \uac15\ud568<\/li>\n<li>\uacf5\uae30 \uc911\uc5d0\uc11c \ub9e4\uc6b0 \ubd88\uc548\uc815\ud558\uc5ec \uc2a4\uc2a4\ub85c \ubc1c\ud654\ud560 \uc218 \uc788\uc74c<\/li>\n<\/ul>\n<p>\uc2e4\ub780 \uac00\uc2a4\ub294 \uacf5\uae30 \uc911\uc5d0\uc11c \uc27d\uac8c \ubc1c\ud654\ud560 \uc218 \uc788\uae30 \ub54c\ubb38\uc5d0, \ubc18\ub3c4\uccb4 \uc81c\uc870 \uacf5\uc815\uc5d0\uc11c\ub294 \uc801\uc808\ud55c \uc548\uc804 \uc870\uce58\uac00 \ud544\uc694\ud569\ub2c8\ub2e4. \uc774 \uac00\uc2a4\ub294 \ub9e4\uc6b0 \ub192\uc740 \uc21c\ub3c4\uc758 \uc2e4\ub9ac\ucf58\uc744 \uc81c\uacf5\ud560 \uc218 \uc788\uae30 \ub54c\ubb38\uc5d0 \ubc18\ub3c4\uccb4 \uc18c\uc790\uc758 \uc131\ub2a5\uc744 \ud5a5\uc0c1\uc2dc\ud0a4\ub294 \ub370 \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4.<\/p>\n<h2>\ubc18\ub3c4\uccb4 \uc81c\uc870\uc5d0\uc11c\uc758 \uc0ac\uc6a9<\/h2>\n<ul>\n<li><strong>\ud654\ud559 \uae30\uc0c1 \uc99d\ucc29(CVD)<\/strong>: \uc2e4\ub780 \uac00\uc2a4\ub294 CVD \uacf5\uc815\uc5d0\uc11c \uc0ac\uc6a9\ub418\uba70, \uace0\uc628\uc5d0\uc11c \uc2e4\ub9ac\ucf58 \uce35\uc744 \ud615\uc131\ud558\uae30 \uc704\ud574 \ubd84\ud574\ub429\ub2c8\ub2e4. \uc774 \uacfc\uc815\uc740 \uc77c\ubc18\uc801\uc73c\ub85c \ub2e4\uc74c\uacfc \uac19\uc740 \ud654\ud559 \ubc18\uc751\uc744 \ud3ec\ud568\ud569\ub2c8\ub2e4:<br \/>\n        SiH<sub>4<\/sub> \u2192 Si + 2H<sub>2<\/sub>\n    <\/li>\n<li><strong>\uc2e4\ub9ac\ucf58 \uc6e8\uc774\ud37c \uc81c\uc791<\/strong>: \uc2e4\ub780 \uac00\uc2a4\ub294 \uace0\uc21c\ub3c4 \uc2e4\ub9ac\ucf58 \uc6e8\uc774\ud37c \uc81c\uc791\uc5d0 \uc0ac\uc6a9\ub429\ub2c8\ub2e4. \uc774 \uc6e8\uc774\ud37c\ub294 \ud2b8\ub79c\uc9c0\uc2a4\ud130, \ub2e4\uc774\uc624\ub4dc, \uae30\ud0c0 \ubc18\ub3c4\uccb4 \uc18c\uc790\ub97c \ub9cc\ub4e4\uae30 \uc704\ud55c \uae30\ucd08 \uc7ac\ub8cc\ub85c \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/li>\n<li><strong>\uc5d4\uc9c0\ub2c8\uc5b4\ub9c1 \uc560\ud50c\ub9ac\ucf00\uc774\uc158<\/strong>: \uc2e4\ub780 \uac00\uc2a4\ub294 \ub2e4\uc591\ud55c \uc5d4\uc9c0\ub2c8\uc5b4\ub9c1 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0\uc11c\ub3c4 \uc0ac\uc6a9\ub429\ub2c8\ub2e4. \uc608\ub97c \ub4e4\uc5b4, \ud0dc\uc591 \uc804\uc9c0 \ud328\ub110\uc5d0\uc11c\ub3c4 \uc911\uc694\ud55c \uc5ed\ud560\uc744 \ud558\uba70, \uace0\ud6a8\uc728 \uad11\ubcc0\ud658 \uc7ac\ub8cc\ub85c \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/li>\n<\/ul>\n<h2>\uc5f4 \uc751\uc6a9<\/h2>\n<p>\uc2e4\ub780 \uac00\uc2a4\ub294 \ubc18\ub3c4\uccb4 \uc81c\uc870 \uacf5\uc815\uc5d0\uc11c \ub192\uc740 \uc628\ub3c4\ub97c \ud544\uc694\ub85c \ud558\uae30 \ub54c\ubb38\uc5d0 \uc5f4 \uc751\uc6a9\uc774 \ub9ce\uc2b5\ub2c8\ub2e4. CVD \uacf5\uc815\uc740 \uc77c\ubc18\uc801\uc73c\ub85c 600-900\ub3c4(C) \uc815\ub3c4\uc758 \uc628\ub3c4\uc5d0\uc11c \uc774\ub8e8\uc5b4\uc9c0\uba70, \uace0\uc628\uc5d0\uc11c \uc2e4\ub9ac\ucf58\uc774 \uc99d\ucc29\ub429\ub2c8\ub2e4. \uc774\uc678\uc5d0\ub3c4 \uc5f4 \ucc98\ub9ac\ub294 \ubc18\ub3c4\uccb4 \uc18c\uc790\uc758 \uc804\uae30\uc801 \ud2b9\uc131\uc744 \ud5a5\uc0c1\uc2dc\ud0a4\uae30 \uc704\ud574 \uc911\uc694\ud55c \ub2e8\uacc4\ub97c \ud3ec\ud568\ud569\ub2c8\ub2e4.<\/p>\n<p>\ubc18\ub3c4\uccb4 \uc81c\uc870\uc5d0\uc11c\ub294 \uc5ec\ub7ec \ub2e8\uacc4\uc5d0\uc11c \uc5f4 \uacf5\uc815\uc774 \ud544\uc694\ud558\uba70, \uc774 \uc911 \uc2e4\ub780 \uac00\uc2a4\ub97c \uc0ac\uc6a9\ud558\ub294 \ud654\ud559 \uae30\uc0c1 \uc99d\ucc29(CVD) \uacf5\uc815\uc740 \ub300\ud45c\uc801\uc778 \uc608\uc785\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uacf5\uc815\ub4e4\uc740 \uace0\ub3c4\uc758 \uc815\ubc00\ub3c4\uc640 \uace0\uc21c\ub3c4 \uc694\uad6c\uc0ac\ud56d\uc744 \ucda9\uc871\ud574\uc57c \ud558\ubbc0\ub85c, \ub9e4\uc6b0 \uc815\uad50\ud55c \uc5d4\uc9c0\ub2c8\uc5b4\ub9c1 \uae30\uc220\uacfc \uc548\uc804 \uad00\ub9ac\uac00 \ud544\uc694\ud569\ub2c8\ub2e4.<\/p>\n","protected":false},"excerpt":{"rendered":"<p>\uc2e4\ub780 \uac00\uc2a4\ub294 \ubc18\ub3c4\uccb4 \uc81c\uc870 \ubc0f \uc5f4 \uc751\uc6a9\uc5d0\uc11c \uc911\uc694\ud55c \uc5ed\ud560\uc744 \ud558\ub294 \uace0\uc21c\ub3c4 \uc2e4\ub9ac\ucf58 \uacf5\uae09\uc6d0\uc73c\ub85c, \uc8fc\ub85c \ud654\ud559 \uae30\uc0c1 \uc99d\ucc29(CVD) \uacf5\uc815\uc5d0\uc11c \uc0ac\uc6a9\ub429\ub2c8\ub2e4, \ubd88\uc548\uc815\ud558\uace0 \ub3c5\uc131\uc774 \uac15\ud569\ub2c8\ub2e4.<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":[],"categories":[124],"tags":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v15.4 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>\uc2e4\ub780 \uac00\uc2a4 | \ubc18\ub3c4\uccb4 \uc81c\uc870\uc640 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