{"id":686109,"date":"2024-10-28T22:01:37","date_gmt":"2024-10-28T21:01:37","guid":{"rendered":"https:\/\/www.thermal-engineering.org\/?p=686109"},"modified":"2024-10-28T22:01:37","modified_gmt":"2024-10-28T21:01:37","slug":"dieu-chinh-nhiet-do-trong-cac-he-thong-vi-co-dien-tu-mems","status":"publish","type":"post","link":"https:\/\/www.thermal-engineering.org\/vi\/dieu-chinh-nhiet-do-trong-cac-he-thong-vi-co-dien-tu-mems\/","title":{"rendered":"\u0110i\u1ec1u ch\u1ec9nh nhi\u1ec7t \u0111\u1ed9 trong c\u00e1c h\u1ec7 th\u1ed1ng vi c\u01a1 \u0111i\u1ec7n t\u1eed (MEMS)"},"content":{"rendered":"<p class=\"sidekick\">\u0110i\u1ec1u ch\u1ec9nh nhi\u1ec7t \u0111\u1ed9 trong MEMS: Kh\u00e1m ph\u00e1 ph\u01b0\u01a1ng ph\u00e1p ki\u1ec3m so\u00e1t nhi\u1ec7t \u0111\u1ed9 hi\u1ec7u qu\u1ea3, t\u0103ng \u0111\u1ed9 ch\u00ednh x\u00e1c v\u00e0 tu\u1ed5i th\u1ecd cho c\u00e1c h\u1ec7 th\u1ed1ng vi c\u01a1 \u0111i\u1ec7n t\u1eed.<\/p>\n<p><img src=\"https:\/\/www.thermal-engineering.org\/wp-content\/uploads\/2024\/07\/dieu_chinh_nhiet_do_trong_cac_he_thong_vi_co_dien_tu_mems.png\" alt=\"\u0110i\u1ec1u ch\u1ec9nh nhi\u1ec7t \u0111\u1ed9 trong c\u00e1c h\u1ec7 th\u1ed1ng vi c\u01a1 \u0111i\u1ec7n t\u1eed (MEMS)\" style=\"display: block; margin-left: auto; margin-right: auto;\"\/><\/p>\n<h2>\u0110i\u1ec1u Ch\u1ec9nh Nhi\u1ec7t \u0110\u1ed9 Trong C\u00e1c H\u1ec7 Th\u1ed1ng Vi C\u01a1 \u0110i\u1ec7n T\u1eed (MEMS)<\/h2>\n<p>Vi c\u01a1 \u0111i\u1ec7n t\u1eed (MEMS &#8211; Micro-Electro-Mechanical Systems) l\u00e0 c\u00e1c h\u1ec7 th\u1ed1ng t\u00edch h\u1ee3p g\u1ed3m c\u00e1c th\u00e0nh ph\u1ea7n c\u01a1 h\u1ecdc v\u00e0 \u0111i\u1ec7n t\u1eed c\u00f3 k\u00edch th\u01b0\u1edbc r\u1ea5t nh\u1ecf. Ch\u00fang \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i trong c\u00e1c l\u0129nh v\u1ef1c nh\u01b0 y t\u1ebf, \u00f4 t\u00f4, h\u00e0ng kh\u00f4ng, v\u00e0 nhi\u1ec1u \u1ee9ng d\u1ee5ng c\u00f4ng nghi\u1ec7p kh\u00e1c. M\u1ed9t v\u1ea5n \u0111\u1ec1 quan tr\u1ecdng trong thi\u1ebft k\u1ebf v\u00e0 v\u1eadn h\u00e0nh MEMS l\u00e0 \u0111i\u1ec1u ch\u1ec9nh nhi\u1ec7t \u0111\u1ed9, v\u00ec nhi\u1ec7t \u0111\u1ed9 \u1ea3nh h\u01b0\u1edfng tr\u1ef1c ti\u1ebfp \u0111\u1ebfn hi\u1ec7u su\u1ea5t v\u00e0 \u0111\u1ed9 b\u1ec1n c\u1ee7a c\u00e1c th\u00e0nh ph\u1ea7n n\u00e0y.<\/p>\n<h2>T\u1ea7m Quan Tr\u1ecdng C\u1ee7a \u0110i\u1ec1u Ch\u1ec9nh Nhi\u1ec7t \u0110\u1ed9<\/h2>\n<ul>\n<li>B\u1ea3o v\u1ec7 c\u00e1c linh ki\u1ec7n kh\u1ecfi qu\u00e1 nhi\u1ec7t.<\/li>\n<li>\u0110\u1ea3m b\u1ea3o t\u00ednh \u1ed5n \u0111\u1ecbnh v\u00e0 \u0111\u1ed9 ch\u00ednh x\u00e1c trong qu\u00e1 tr\u00ecnh ho\u1ea1t \u0111\u1ed9ng.<\/li>\n<li>T\u0103ng tu\u1ed5i th\u1ecd v\u00e0 \u0111\u1ed9 b\u1ec1n c\u1ee7a h\u1ec7 th\u1ed1ng.<\/li>\n<\/ul>\n<h2>Nguy\u00ean L\u00fd \u0110i\u1ec1u Ch\u1ec9nh Nhi\u1ec7t \u0110\u1ed9<\/h2>\n<p>\u0110i\u1ec1u ch\u1ec9nh nhi\u1ec7t \u0111\u1ed9 trong h\u1ec7 th\u1ed1ng MEMS th\u01b0\u1eddng \u0111\u01b0\u1ee3c th\u1ef1c hi\u1ec7n th\u00f4ng qua c\u00e1c c\u01a1 ch\u1ebf sau:<\/p>\n<ol>\n<li><b>\u0110i\u1ec7n tr\u1edf nhi\u1ec7t (Thermal Resistors):<\/b> \u0110i\u1ec7n tr\u1edf nhi\u1ec7t l\u00e0 th\u00e0nh ph\u1ea7n c\u00f3 kh\u1ea3 n\u0103ng thay \u0111\u1ed5i gi\u00e1 tr\u1ecb \u0111i\u1ec7n tr\u1edf theo nhi\u1ec7t \u0111\u1ed9. B\u1eb1ng c\u00e1ch gi\u00e1m s\u00e1t s\u1ef1 thay \u0111\u1ed5i n\u00e0y, h\u1ec7 th\u1ed1ng c\u00f3 th\u1ec3 \u0111i\u1ec1u ch\u1ec9nh nhi\u1ec7t \u0111\u1ed9 th\u00f4ng qua vi\u1ec7c t\u0103ng ho\u1eb7c gi\u1ea3m d\u00f2ng \u0111i\u1ec7n \u0111i qua.<\/li>\n<li><b>Hi\u1ec7u \u1ee9ng Peltier:<\/b> Hi\u1ec7u \u1ee9ng Peltier x\u1ea3y ra khi d\u00f2ng \u0111i\u1ec7n ch\u1ea1y qua m\u1ed1i n\u1ed1i c\u1ee7a hai v\u1eadt li\u1ec7u kh\u00e1c nhau, g\u00e2y ra s\u1ef1 truy\u1ec1n nhi\u1ec7t t\u1eeb m\u1ed9t \u0111\u1ea7u t\u1edbi \u0111\u1ea7u kia. \u0110i\u1ec1u n\u00e0y c\u00f3 th\u1ec3 s\u1eed d\u1ee5ng \u0111\u1ec3 l\u00e0m m\u00e1t ho\u1eb7c l\u00e0m n\u00f3ng c\u00e1c th\u00e0nh ph\u1ea7n MEMS.<\/li>\n<li><b>Qu\u1ea1t v\u00e0 t\u1ea3n nhi\u1ec7t:<\/b> C\u00e1c thi\u1ebft b\u1ecb l\u00e0m m\u00e1t ch\u1ee7 \u0111\u1ed9ng nh\u01b0 qu\u1ea1t v\u00e0 t\u1ea3n nhi\u1ec7t c\u0169ng c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng \u0111\u1ec3 \u0111i\u1ec1u ch\u1ec9nh nhi\u1ec7t \u0111\u1ed9. \u0110\u00e2y l\u00e0 ph\u01b0\u01a1ng ph\u00e1p ph\u1ed5 bi\u1ebfn trong c\u00e1c h\u1ec7 th\u1ed1ng MEMS c\u00f3 c\u00f4ng su\u1ea5t l\u1edbn.<\/li>\n<\/ol>\n<h2>C\u00f4ng Th\u1ee9c C\u01a1 B\u1ea3n<\/h2>\n<p>\u0110\u1ec3 \u0111i\u1ec1u ch\u1ec9nh nhi\u1ec7t \u0111\u1ed9, c\u1ea7n t\u00ednh to\u00e1n l\u01b0\u1ee3ng nhi\u1ec7t c\u1ea7n truy\u1ec1n ho\u1eb7c lo\u1ea1i b\u1ecf. Ph\u01b0\u01a1ng tr\u00ecnh t\u00ednh to\u00e1n n\u0103ng l\u01b0\u1ee3ng nhi\u1ec7t truy\u1ec1n c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c vi\u1ebft nh\u01b0 sau:<\/p>\n<p>Q = m * c * \u0394T<\/p>\n<p>Trong \u0111\u00f3:<\/p>\n<ul>\n<li>Q l\u00e0 l\u01b0\u1ee3ng nhi\u1ec7t (Joules).<\/li>\n<li>m l\u00e0 kh\u1ed1i l\u01b0\u1ee3ng v\u1eadt th\u1ec3 (kg).<\/li>\n<li>c l\u00e0 nhi\u1ec7t dung ri\u00eang c\u1ee7a v\u1eadt li\u1ec7u (J\/kg.K).<\/li>\n<li>\u0394T l\u00e0 s\u1ef1 thay \u0111\u1ed5i nhi\u1ec7t \u0111\u1ed9 (K).<\/li>\n<\/ul>\n<h2>\u1ee8ng D\u1ee5ng Th\u1ef1c T\u1ebf<\/h2>\n<p>M\u1ed9t v\u00ed d\u1ee5 th\u1ef1c t\u1ebf c\u1ee7a \u0111i\u1ec1u ch\u1ec9nh nhi\u1ec7t \u0111\u1ed9 trong MEMS l\u00e0 trong c\u00e1c c\u1ea3m bi\u1ebfn nhi\u1ec7t \u0111\u1ed9 v\u00e0 \u00e1p su\u1ea5t, n\u01a1i y\u00eau c\u1ea7u \u0111\u1ed9 ch\u00ednh x\u00e1c cao. C\u00e1c c\u1ea3m bi\u1ebfn n\u00e0y c\u1ea7n ph\u1ea3i duy tr\u00ec nhi\u1ec7t \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh \u0111\u1ec3 cung c\u1ea5p d\u1eef li\u1ec7u ch\u00ednh x\u00e1c. \u0110\u00e2y l\u00e0 m\u1ed9t trong nh\u1eefng l\u00fd do t\u1ea1i sao \u0111i\u1ec1u ch\u1ec9nh nhi\u1ec7t \u0111\u1ed9 l\u00e0 m\u1ed9t ph\u1ea7n kh\u00f4ng th\u1ec3 thi\u1ebfu trong thi\u1ebft k\u1ebf MEMS.<\/p>\n<h2>K\u1ebft Lu\u1eadn<\/h2>\n<p>\u0110i\u1ec1u ch\u1ec9nh nhi\u1ec7t \u0111\u1ed9 l\u00e0 m\u1ed9t y\u1ebfu t\u1ed1 quan tr\u1ecdng trong vi\u1ec7c \u0111\u1ea3m b\u1ea3o hi\u1ec7u su\u1ea5t v\u00e0 tu\u1ed5i th\u1ecd c\u1ee7a c\u00e1c h\u1ec7 th\u1ed1ng MEMS. B\u1eb1ng c\u00e1ch \u00e1p d\u1ee5ng c\u00e1c ph\u01b0\u01a1ng ph\u00e1p v\u00e0 c\u00f4ng th\u1ee9c th\u00edch h\u1ee3p, c\u00f3 th\u1ec3 ki\u1ec3m so\u00e1t v\u00e0 t\u1ed1i \u01b0u h\u00f3a nhi\u1ec7t \u0111\u1ed9 trong c\u00e1c \u1ee9ng d\u1ee5ng kh\u00e1c nhau. \u0110i\u1ec1u n\u00e0y gi\u00fap MEMS ho\u1ea1t \u0111\u1ed9ng m\u1ed9t c\u00e1ch hi\u1ec7u qu\u1ea3 h\u01a1n v\u00e0 b\u1ec1n b\u1ec9 h\u01a1n.<\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u0110i\u1ec1u ch\u1ec9nh nhi\u1ec7t \u0111\u1ed9 trong MEMS: Kh\u00e1m ph\u00e1 ph\u01b0\u01a1ng ph\u00e1p ki\u1ec3m so\u00e1t nhi\u1ec7t \u0111\u1ed9 hi\u1ec7u qu\u1ea3, t\u0103ng \u0111\u1ed9 ch\u00ednh x\u00e1c v\u00e0 tu\u1ed5i th\u1ecd cho c\u00e1c h\u1ec7 th\u1ed1ng vi c\u01a1 \u0111i\u1ec7n t\u1eed.<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":[],"categories":[132],"tags":[],"yoast_head":"<!-- This site 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