{"id":692446,"date":"2024-10-18T19:28:40","date_gmt":"2024-10-18T18:28:40","guid":{"rendered":"https:\/\/www.thermal-engineering.org\/?p=692446"},"modified":"2024-10-18T19:28:40","modified_gmt":"2024-10-18T18:28:40","slug":"krypton-fluoride-laser-excimer-photon-nang-luong-cao","status":"publish","type":"post","link":"https:\/\/www.thermal-engineering.org\/vi\/krypton-fluoride-laser-excimer-photon-nang-luong-cao\/","title":{"rendered":"Krypton Fluoride | Laser Excimer, Photon N\u0103ng L\u01b0\u1ee3ng Cao"},"content":{"rendered":"<p class=\"sidekick\">C\u00e1c \u1ee9ng d\u1ee5ng c\u1ee7a Krypton Fluoride v\u00e0 laser excimer trong thermal engineering, t\u1ea1o ra photon n\u0103ng l\u01b0\u1ee3ng cao h\u1eefu \u00edch cho c\u00f4ng ngh\u1ec7 y t\u1ebf v\u00e0 microfabrication.<\/p>\n<p><img src=\"https:\/\/www.thermal-engineering.org\/wp-content\/uploads\/2024\/07\/krypton_fluoride_laser_excimer_photon_nang_luong_cao.png\" alt=\"Krypton Fluoride | Laser Excimer, Photon N\u0103ng L\u01b0\u1ee3ng Cao\" style=\"display: block; margin-left: auto; margin-right: auto;\"\/><\/p>\n<h2>Krypton Fluoride | Laser Excimer, Photon N\u0103ng L\u01b0\u1ee3ng Cao<\/h2>\n<p>Trong l\u0129nh v\u1ef1c k\u1ef9 thu\u1eadt nhi\u1ec7t, laser excimer l\u00e0 m\u1ed9t trong nh\u1eefng c\u00f4ng c\u1ee5 quan tr\u1ecdng nh\u1ea5t nh\u1edd kh\u1ea3 n\u0103ng t\u1ea1o ra c\u00e1c photon c\u00f3 n\u0103ng l\u01b0\u1ee3ng cao. M\u1ed9t trong nh\u1eefng lo\u1ea1i laser excimer ph\u1ed5 bi\u1ebfn nh\u1ea5t l\u00e0 laser Krypton Fluoride (KrF).<\/p>\n<h3>Laser Excimer L\u00e0 G\u00ec?<\/h3>\n<p>Laser excimer (hay &#8220;excited dimer&#8221;) l\u00e0 m\u1ed9t lo\u1ea1i laser kh\u00ed m\u00e0 c\u00e1c m\u00f4i tr\u01b0\u1eddng ho\u1ea1t ch\u1ea5t c\u1ee7a n\u00f3 l\u00e0 c\u00e1c ph\u00e2n t\u1eed t\u1ea1m th\u1eddi \u0111\u01b0\u1ee3c h\u00ecnh th\u00e0nh t\u1eeb c\u00e1c nguy\u00ean t\u1eed ho\u1eb7c ph\u00e2n t\u1eed kh\u00e1c nhau. Khi c\u00e1c ph\u00e2n t\u1eed n\u00e0y chuy\u1ec3n t\u1eeb tr\u1ea1ng th\u00e1i k\u00edch th\u00edch xu\u1ed1ng tr\u1ea1ng th\u00e1i c\u01a1 b\u1ea3n, ch\u00fang ph\u00e1t ra \u00e1nh s\u00e1ng v\u1edbi m\u1ed9t b\u01b0\u1edbc s\u00f3ng \u0111\u1eb7c tr\u01b0ng. Trong tr\u01b0\u1eddng h\u1ee3p c\u1ee7a laser KrF, m\u00f4i tr\u01b0\u1eddng ho\u1ea1t ch\u1ea5t l\u00e0 ph\u00e2n t\u1eed Krypton Fluoride (KrF).<\/p>\n<h3>\u0110\u1eb7c \u0110i\u1ec3m C\u1ee7a Laser KrF<\/h3>\n<ul>\n<li><b>B\u01b0\u1edbc s\u00f3ng ph\u00e1t x\u1ea1:<\/b> Laser KrF ph\u00e1t ra \u00e1nh s\u00e1ng v\u1edbi b\u01b0\u1edbc s\u00f3ng kho\u1ea3ng 248 nanomet (nm).<\/li>\n<li><b>N\u0103ng l\u01b0\u1ee3ng photon:<\/b> \u00c1nh s\u00e1ng t\u1eeb laser KrF c\u00f3 n\u0103ng l\u01b0\u1ee3ng photon cao, kho\u1ea3ng 5 eV (electronvolt).<\/li>\n<li><b>\u1ee8ng d\u1ee5ng:<\/b> Laser KrF th\u01b0\u1eddng \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng trong kh\u1eafc ph\u1eabu thu\u1eadt laser, ch\u1ebf t\u1ea1o vi m\u1ea1ch, v\u00e0 c\u00e1c \u1ee9ng d\u1ee5ng quang h\u1ecdc kh\u00e1c \u0111\u1eb7t n\u0103ng l\u01b0\u1ee3ng cao v\u00e0 \u0111\u1ed9 ch\u00ednh x\u00e1c.<\/li>\n<\/ul>\n<h3>Nguy\u00ean l\u00fd Ho\u1ea1t \u0110\u1ed9ng<\/h3>\n<p>Laser KrF ho\u1ea1t \u0111\u1ed9ng d\u1ef1a tr\u00ean s\u1ef1 k\u00edch th\u00edch v\u00e0 tho\u00e1i h\u00f3a c\u1ee7a c\u00e1c ph\u00e2n t\u1eed KrF. Qu\u00e1 tr\u00ecnh n\u00e0y c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c t\u00f3m t\u1eaft nh\u01b0 sau:<\/p>\n<ol>\n<li><b>K\u00edch th\u00edch:<\/b> Krypton (Kr) v\u00e0 Fluorine (F<sub>2<\/sub>) \u0111\u01b0\u1ee3c n\u1ea1p v\u00e0o trong bu\u1ed3ng ph\u1ea3n \u1ee9ng v\u00e0 k\u00edch th\u00edch b\u1eb1ng m\u1ed9t ngu\u1ed3n n\u0103ng l\u01b0\u1ee3ng ngo\u00e0i, nh\u01b0 ph\u00f3ng \u0111i\u1ec7n cao \u00e1p.<\/li>\n<li><b>H\u00ecnh th\u00e0nh ph\u00e2n t\u1eed KrF*:<\/b> D\u01b0\u1edbi t\u00e1c \u0111\u1ed9ng c\u1ee7a n\u0103ng l\u01b0\u1ee3ng ph\u00f3ng \u0111i\u1ec7n, Krypton v\u00e0 Fluorine k\u1ebft h\u1ee3p t\u1ea1o th\u00e0nh ph\u00e2n t\u1eed KrF trong tr\u1ea1ng th\u00e1i k\u00edch th\u00edch (KrF*).<\/li>\n<li><b>Ph\u00e1t x\u1ea1:<\/b> C\u00e1c ph\u00e2n t\u1eed KrF* tr\u1edf l\u1ea1i tr\u1ea1ng th\u00e1i c\u01a1 b\u1ea3n, ph\u00e1t ra photon c\u00f3 b\u01b0\u1edbc s\u00f3ng trong v\u00f9ng c\u1ef1c t\u00edm (th\u01b0\u1eddng \u1edf 248 nm).<\/li>\n<\/ol>\n<h3>\u01afu \u0110i\u1ec3m V\u00e0 H\u1ea1n Ch\u1ebf<\/h3>\n<ul>\n<li><b>\u01afu \u0111i\u1ec3m:<\/b> Laser KrF c\u00f3 kh\u1ea3 n\u0103ng ph\u00e1t ra \u00e1nh s\u00e1ng c\u1ef1c t\u00edm v\u1edbi n\u0103ng l\u01b0\u1ee3ng cao, gi\u00fap \u0111\u1ea1t \u0111\u1ed9 ch\u00ednh x\u00e1c cao trong c\u00e1c qu\u00e1 tr\u00ecnh ch\u1ebf t\u1ea1o v\u00e0 x\u1eed l\u00fd v\u1eadt li\u1ec7u.<\/li>\n<li><b>H\u1ea1n ch\u1ebf:<\/b> Thi\u1ebft b\u1ecb laser excimer th\u01b0\u1eddng ph\u1ee9c t\u1ea1p v\u00e0 \u0111\u00f2i h\u1ecfi quy tr\u00ecnh b\u1ea3o d\u01b0\u1ee1ng k\u1ef9 l\u01b0\u1ee1ng. C\u00e1c kh\u00ed \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng c\u00f3 th\u1ec3 \u0111\u1ed9c h\u1ea1i v\u00e0 ph\u1ea3i \u0111\u01b0\u1ee3c x\u1eed l\u00fd c\u1ea9n th\u1eadn.<\/li>\n<\/ul>\n<p>K\u1ebft l\u1ea1i, laser Krypton Fluoride (KrF) l\u00e0 m\u1ed9t c\u00f4ng c\u1ee5 c\u1ef1c k\u1ef3 hi\u1ec7u qu\u1ea3 trong nhi\u1ec1u \u1ee9ng d\u1ee5ng khoa h\u1ecdc v\u00e0 c\u00f4ng ngh\u1ec7. V\u1edbi kh\u1ea3 n\u0103ng ph\u00e1t ra \u00e1nh s\u00e1ng b\u01b0\u1edbc s\u00f3ng c\u1ef1c t\u00edm v\u00e0 n\u0103ng l\u01b0\u1ee3ng photon cao, n\u00f3 kh\u00f4ng ch\u1ec9 m\u1edf ra nh\u1eefng kh\u1ea3 n\u0103ng m\u1edbi trong nghi\u00ean c\u1ee9u m\u00e0 c\u00f2n n\u00e2ng cao \u0111\u1ed9 ch\u00ednh x\u00e1c trong c\u00e1c \u1ee9ng d\u1ee5ng k\u1ef9 thu\u1eadt.<\/p>\n","protected":false},"excerpt":{"rendered":"<p>C\u00e1c \u1ee9ng d\u1ee5ng c\u1ee7a Krypton Fluoride v\u00e0 laser excimer trong thermal engineering, t\u1ea1o ra photon n\u0103ng l\u01b0\u1ee3ng cao h\u1eefu \u00edch cho c\u00f4ng ngh\u1ec7 y t\u1ebf v\u00e0 microfabrication.<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":[],"categories":[132],"tags":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v15.4 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>Krypton Fluoride 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