{"id":692620,"date":"2024-09-08T02:21:50","date_gmt":"2024-09-08T01:21:50","guid":{"rendered":"https:\/\/www.thermal-engineering.org\/?p=692620"},"modified":"2024-09-08T02:21:50","modified_gmt":"2024-09-08T01:21:50","slug":"nito-trifluoride-lam-sach-plasma-on-dinh-nhiet","status":"publish","type":"post","link":"https:\/\/www.thermal-engineering.org\/vi\/nito-trifluoride-lam-sach-plasma-on-dinh-nhiet\/","title":{"rendered":"Nit\u01a1 Trifluoride | L\u00e0m S\u1ea1ch Plasma, \u1ed4n \u0110\u1ecbnh Nhi\u1ec7t"},"content":{"rendered":"<p class=\"sidekick\">Kh\u00ed Nit\u01a1 Trifluoride | \u1ee8ng d\u1ee5ng t\u1ea9y r\u1eeda plasma, \u1ed5n \u0111\u1ecbnh nhi\u1ec7t trong s\u1ea3n xu\u1ea5t c\u00f4ng nghi\u1ec7p, c\u1ea3i thi\u1ec7n hi\u1ec7u su\u1ea5t v\u00e0 b\u1ea3o v\u1ec7 m\u00f4i tr\u01b0\u1eddng.<\/p>\n<p><img src=\"https:\/\/www.thermal-engineering.org\/wp-content\/uploads\/2024\/07\/nito_trifluoride_lam_sach_plasma_on_dinh_nhiet.png\" alt=\"Nit\u01a1 Trifluoride | L\u00e0m S\u1ea1ch Plasma, \u1ed4n \u0110\u1ecbnh Nhi\u1ec7t\" style=\"display: block; margin-left: auto; margin-right: auto;\"\/><\/p>\n<h2>Nit\u01a1 Trifluoride: L\u00e0m S\u1ea1ch Plasma, \u1ed4n \u0110\u1ecbnh Nhi\u1ec7t<\/h2>\n<p>Nit\u01a1 trifluoride (NF<sub>3<\/sub>) l\u00e0 m\u1ed9t h\u1ee3p ch\u1ea5t v\u00f4 c\u01a1 c\u00f3 t\u00ednh ch\u1ea5t \u0111\u1eb7c bi\u1ec7t v\u00e0 nhi\u1ec1u \u1ee9ng d\u1ee5ng quan tr\u1ecdng trong ng\u00e0nh c\u00f4ng nghi\u1ec7p, \u0111\u1eb7c bi\u1ec7t l\u00e0 trong c\u00e1c qu\u00e1 tr\u00ecnh s\u1ea3n xu\u1ea5t \u0111i\u1ec7n t\u1eed v\u00e0 l\u00e0m s\u1ea1ch plasma. H\u1ee3p ch\u1ea5t n\u00e0y c\u00f3 c\u00f4ng th\u1ee9c h\u00f3a h\u1ecdc l\u00e0 NF<sub>3<\/sub>, t\u01b0\u01a1ng \u0111\u01b0\u01a1ng v\u1edbi m\u1ed9t ph\u00e2n t\u1eed nit\u01a1 \u0111\u01b0\u1ee3c li\u00ean k\u1ebft v\u1edbi ba nguy\u00ean t\u1eed fluor.<\/p>\n<h3>T\u00ednh Ch\u1ea5t H\u00f3a H\u1ecdc v\u00e0 V\u1eadt L\u00fd c\u1ee7a NF<sub>3<\/sub><\/h3>\n<p>NF<sub>3<\/sub> l\u00e0 m\u1ed9t ch\u1ea5t kh\u00ed kh\u00f4ng m\u00e0u, kh\u00f4ng m\u00f9i v\u00e0 c\u00f3 t\u00ednh axit y\u1ebfu. N\u00f3 c\u00f3 kh\u1ea3 n\u0103ng ph\u1ea3n \u1ee9ng v\u1edbi nhi\u1ec1u ch\u1ea5t kh\u00e1c nhau t\u1ea1o th\u00e0nh c\u00e1c s\u1ea3n ph\u1ea9m ph\u1ee5 nh\u01b0 trifluoride v\u00e0 c\u00e1c h\u1ee3p ch\u1ea5t kh\u00e1c. NF<sub>3<\/sub> c\u00f3 nhi\u1ec7t \u0111\u1ed9 s\u00f4i -129\u00b0C v\u00e0 nhi\u1ec7t \u0111\u1ed9 n\u00f3ng ch\u1ea3y t\u1eeb -206\u00b0C \u0111\u1ebfn -207\u00b0C. \u0110\u1ec3 bi\u1ebft chi ti\u1ebft v\u1ec1 t\u00ednh ch\u1ea5t n\u00e0y, xem b\u1ea3ng d\u01b0\u1edbi \u0111\u00e2y:<\/p>\n<ul>\n<li>Kh\u1ed1i l\u01b0\u1ee3ng ph\u00e2n t\u1eed: 71 g\/mol<\/li>\n<li>Nhi\u1ec7t \u0111\u1ed9 s\u00f4i: -129\u00b0C<\/li>\n<li>Nhi\u1ec7t \u0111\u1ed9 n\u00f3ng ch\u1ea3y: -207\u00b0C<\/li>\n<li>T\u1ef7 tr\u1ecdng: 3.003 kg\/m<sup>3<\/sup> (\u1edf 25\u00b0C)<\/li>\n<\/ul>\n<h3>\u1ee8ng D\u1ee5ng trong L\u00e0m S\u1ea1ch Plasma<\/h3>\n<p>NF<sub>3<\/sub> th\u01b0\u1eddng \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng trong qu\u00e1 tr\u00ecnh l\u00e0m s\u1ea1ch plasma, m\u1ed9t qu\u00e1 tr\u00ecnh quan tr\u1ecdng trong s\u1ea3n xu\u1ea5t c\u00e1c linh ki\u1ec7n b\u00e1n d\u1eabn. Qu\u00e1 tr\u00ecnh n\u00e0y bao g\u1ed3m vi\u1ec7c lo\u1ea1i b\u1ecf c\u00e1c t\u1ea1p ch\u1ea5t v\u00e0 c\u1eb7n b\u00e3 t\u1eeb b\u1ec1 m\u1eb7t c\u1ee7a wafer silicon th\u00f4ng qua vi\u1ec7c s\u1eed d\u1ee5ng plasma c\u1ee7a NF<sub>3<\/sub>. Plasma n\u00e0y t\u1ea1o ra c\u00e1c radical fluorine (F*) c\u00f3 kh\u1ea3 n\u0103ng t\u1ea5n c\u00f4ng v\u00e0 lo\u1ea1i b\u1ecf c\u00e1c t\u1ea1p ch\u1ea5t m\u1ed9t c\u00e1ch hi\u1ec7u qu\u1ea3.<\/p>\n<p>C\u00f4ng th\u1ee9c ph\u1ea3n \u1ee9ng c\u1ee7a NF<sub>3<\/sub> trong qu\u00e1 tr\u00ecnh l\u00e0m s\u1ea1ch plasma:<\/p>\n<p>NF<sub>3<\/sub> \u2192 N + 3F*<\/p>\n<p>C\u00e1c radical fluorine sau \u0111\u00f3 t\u01b0\u01a1ng t\u00e1c v\u1edbi c\u00e1c t\u1ea1p ch\u1ea5t, t\u1ea1o th\u00e0nh c\u00e1c h\u1ee3p ch\u1ea5t d\u1ec5 bay h\u01a1i v\u00e0 b\u1ecb lo\u1ea1i b\u1ecf ra kh\u1ecfi h\u1ec7 th\u1ed1ng.<\/p>\n<h3>Vai Tr\u00f2 trong \u1ed4n \u0110\u1ecbnh Nhi\u1ec7t<\/h3>\n<p>NF<sub>3<\/sub> c\u0169ng \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng trong c\u00e1c \u1ee9ng d\u1ee5ng \u1ed5n \u0111\u1ecbnh nhi\u1ec7t, \u0111\u00e1ng ch\u00fa \u00fd l\u00e0 c\u00e1c h\u1ec7 th\u1ed1ng chuy\u1ec3n \u0111\u1ed5i nhi\u1ec7t v\u00e0 c\u00e1c qu\u00e1 tr\u00ecnh \u0111\u00f2i h\u1ecfi ki\u1ec3m so\u00e1t nhi\u1ec7t \u0111\u1ed9 ch\u00ednh x\u00e1c. Do t\u00ednh ch\u1ea5t kh\u00f4ng ch\u00e1y v\u00e0 kh\u00f4ng ph\u1ea3n \u1ee9ng d\u01b0\u1edbi \u0111i\u1ec1u ki\u1ec7n th\u00f4ng th\u01b0\u1eddng, NF<sub>3<\/sub> l\u00e0 m\u1ed9t l\u1ef1a ch\u1ecdn an to\u00e0n v\u00e0 hi\u1ec7u qu\u1ea3 cho vi\u1ec7c duy tr\u00ec nhi\u1ec7t \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh trong nhi\u1ec1u h\u1ec7 th\u1ed1ng k\u1ef9 thu\u1eadt.<\/p>\n<p>V\u00ed d\u1ee5, trong c\u00e1c h\u1ec7 th\u1ed1ng chuy\u1ec3n \u0111\u1ed5i nhi\u1ec7t, NF<sub>3<\/sub> c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng nh\u01b0 m\u1ed9t gas l\u00e0m l\u1ea1nh, gi\u00fap duy tr\u00ec nhi\u1ec7t \u0111\u1ed9 \u1edf m\u1ee9c \u1ed5n \u0111\u1ecbnh v\u00e0 hi\u1ec7u qu\u1ea3.<\/p>\n<h3>K\u1ebft Lu\u1eadn<\/h3>\n<p>Nit\u01a1 trifluoride (NF<sub>3<\/sub>) l\u00e0 m\u1ed9t h\u1ee3p ch\u1ea5t c\u00f3 nhi\u1ec1u \u1ee9ng d\u1ee5ng quan tr\u1ecdng trong c\u00f4ng nghi\u1ec7p, \u0111\u1eb7c bi\u1ec7t l\u00e0 trong c\u00e1c qu\u00e1 tr\u00ecnh l\u00e0m s\u1ea1ch plasma v\u00e0 \u1ed5n \u0111\u1ecbnh nhi\u1ec7t. V\u1edbi c\u00e1c t\u00ednh ch\u1ea5t h\u00f3a h\u1ecdc v\u00e0 v\u1eadt l\u00fd \u0111\u1eb7c bi\u1ec7t, NF<sub>3<\/sub> \u0111\u00e3 v\u00e0 \u0111ang \u0111\u00f3ng g\u00f3p to l\u1edbn v\u00e0o s\u1ef1 ph\u00e1t tri\u1ec3n c\u1ee7a ng\u00e0nh c\u00f4ng nghi\u1ec7p hi\u1ec7n \u0111\u1ea1i.<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Kh\u00ed Nit\u01a1 Trifluoride | \u1ee8ng d\u1ee5ng t\u1ea9y r\u1eeda plasma, \u1ed5n \u0111\u1ecbnh nhi\u1ec7t trong s\u1ea3n xu\u1ea5t c\u00f4ng nghi\u1ec7p, c\u1ea3i thi\u1ec7n hi\u1ec7u su\u1ea5t v\u00e0 b\u1ea3o v\u1ec7 m\u00f4i tr\u01b0\u1eddng.<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":[],"categories":[132],"tags":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v15.4 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>Nit\u01a1 Trifluoride | L\u00e0m S\u1ea1ch Plasma, \u1ed4n 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