{"id":735524,"date":"2024-12-21T16:13:05","date_gmt":"2024-12-21T15:13:05","guid":{"rendered":"https:\/\/www.thermal-engineering.org\/?p=735524"},"modified":"2024-12-21T16:13:05","modified_gmt":"2024-12-21T15:13:05","slug":"%e7%a1%85%e7%83%b7%e6%b0%94%e4%bd%93-%e5%8d%8a%e5%af%bc%e4%bd%93%e5%88%b6%e9%80%a0%e5%8f%8a%e7%83%ad%e5%ba%94%e7%94%a8","status":"publish","type":"post","link":"https:\/\/www.thermal-engineering.org\/zh-hans\/%e7%a1%85%e7%83%b7%e6%b0%94%e4%bd%93-%e5%8d%8a%e5%af%bc%e4%bd%93%e5%88%b6%e9%80%a0%e5%8f%8a%e7%83%ad%e5%ba%94%e7%94%a8\/","title":{"rendered":"\u7845\u70f7\u6c14\u4f53 | \u534a\u5bfc\u4f53\u5236\u9020\u53ca\u70ed\u5e94\u7528"},"content":{"rendered":"<p class=\"sidekick\">\u7845\u70f7\u6c14\u4f53\u5728\u534a\u5bfc\u4f53\u5236\u9020\u4e2d\u4f5c\u4e3a\u5173\u952e\u6750\u6599\uff0c\u5e76\u5728\u70ed\u5e94\u7528\u4e2d\u7528\u4e8e\u8584\u819c\u6c89\u79ef\uff0c\u52a9\u529b\u63d0\u5347\u5668\u4ef6\u6027\u80fd\u548c\u751f\u4ea7\u6548\u7387\u3002\u4e86\u89e3\u5176\u7279\u6027\u53ca\u5e94\u7528\u3002<\/p>\n<p><img src=\"https:\/\/www.thermal-engineering.org\/wp-content\/uploads\/2024\/07\/\u7845\u70f7\u6c14\u4f53_\u534a\u5bfc\u4f53\u5236\u9020\u53ca\u70ed\u5e94\u7528.png\" alt=\"\u7845\u70f7\u6c14\u4f53 | \u534a\u5bfc\u4f53\u5236\u9020\u53ca\u70ed\u5e94\u7528\" style=\"display: block; margin-left: auto; margin-right: auto;\"\/><\/p>\n<h2>\u7845\u70f7\u6c14\u4f53 | \u534a\u5bfc\u4f53\u5236\u9020\u53ca\u70ed\u5e94\u7528<\/h2>\n<p>\u7845\u70f7\u6c14\u4f53 (SiH<sub>4<\/sub>) \u662f\u534a\u5bfc\u4f53\u5236\u9020\u8fc7\u7a0b\u4e2d\u7684\u4e00\u79cd\u91cd\u8981\u6750\u6599\uff0c\u5b83\u5728\u751f\u4ea7\u8fc7\u7a0b\u4e2d\u8d77\u7740\u81f3\u5173\u91cd\u8981\u7684\u4f5c\u7528\u3002\u7845\u70f7\u662f\u4e00\u79cd\u65e0\u8272\u4e14\u6781\u6613\u71c3\u7684\u6c14\u4f53\uff0c\u901a\u5e38\u5728\u4f4e\u6e29\u4e0b\u50a8\u5b58\u548c\u8fd0\u8f93\u3002<\/p>\n<h2>\u7845\u70f7\u6c14\u4f53\u5728\u534a\u5bfc\u4f53\u5236\u9020\u4e2d\u7684\u5e94\u7528<\/h2>\n<ul>\n<li><strong>\u5316\u5b66\u6c14\u76f8\u6c89\u79ef (CVD)<\/strong>: \u7845\u70f7\u6c14\u4f53\u5728\u534a\u5bfc\u4f53\u5236\u9020\u4e2d\u6700\u5e38\u89c1\u7684\u5e94\u7528\u4e4b\u4e00\u662f\u5316\u5b66\u6c14\u76f8\u6c89\u79ef (Chemical Vapor Deposition, CVD)\u3002\u5728CVD\u5de5\u827a\u4e2d\uff0c\u7845\u70f7\u6c14\u4f53\u88ab\u5206\u89e3\u6210\u7845\u548c\u6c22\uff0c\u901a\u8fc7\u6c89\u79ef\u5c06\u7845\u5c42\u8986\u76d6\u5728\u57fa\u7247\u4e0a\u3002\u8be5\u5de5\u827a\u5e7f\u6cdb\u7528\u4e8e\u6676\u5706\u5236\u9020\u4ee5\u53ca\u5fae\u7535\u5b50\u8bbe\u5907\u7684\u751f\u4ea7\u3002<\/li>\n<li><strong>\u7845\u6c27\u70f7\u6d82\u5c42<\/strong>: \u53e6\u4e00\u4e2a\u5e38\u89c1\u7684\u5e94\u7528\u662f\u5229\u7528\u7845\u70f7\u6c14\u4f53\u5728\u6c27\u6c14\u5b58\u5728\u4e0b\u52a0\u70ed\u5f62\u6210\u7845\u6c27\u70f7 (SiO<sub>x<\/sub>) \u6d82\u5c42\u3002\u8fd9\u4e9b\u6d82\u5c42\u7528\u4e8e\u4fdd\u62a4\u548c\u7edd\u7f18\u7845\u7247\u3002<\/li>\n<\/ul>\n<h2>\u7845\u70f7\u6c14\u4f53\u7684\u70ed\u5e94\u7528<\/h2>\n<ol>\n<li><strong>\u70ed\u5206\u89e3<\/strong>: \u7845\u70f7\u5728\u9ad8\u6e29\u4e0b\u5bb9\u6613\u5206\u89e3\uff0c\u8fd9\u4e00\u7279\u6027\u88ab\u5e7f\u6cdb\u5e94\u7528\u4e8eCVD\u8fc7\u7a0b\u4e2d\u3002\u4f8b\u5982\uff0cSiH<sub>4<\/sub> \u5728 \\text{700-1200} \u00b0C \u4e0b\u5206\u89e3\u6210 Si \u548c H<sub>2<\/sub>\u3002\u516c\u5f0f\u5982\u4e0b: <br \/> <br \/>\n  SiH<sub>4<\/sub> \u2192 Si + 2H<sub>2<\/sub>\n  <\/li>\n<li><strong>\u70ed\u6c27\u5316<\/strong>: \u7845\u70f7\u6c14\u4f53\u5728\u9ad8\u6e29\u73af\u5883\u4e0b\u7684\u6c27\u5316\u53cd\u5e94\u53ef\u4ee5\u751f\u6210\u7845\u6c27\u5316\u7269(SiO<sub>2<\/sub>)\u3002\u8be5\u53cd\u5e94\u7684\u91cd\u8981\u6027\u5728\u4e8e\u5176\u53ef\u4ee5\u751f\u6210\u9ad8\u54c1\u8d28\u7684\u6c27\u5316\u7845\u5c42\uff0c\u7528\u4e8e\u534a\u5bfc\u4f53\u5668\u4ef6\u7684\u7edd\u7f18\u548c\u949d\u5316\u3002\u4f8b\u5982:<br \/>\n  <br \/> <br \/>\n  SiH<sub>4<\/sub> + 2O<sub>2<\/sub> \u2192 SiO<sub>2<\/sub> + 2H<sub>2<\/sub>O\n  <\/li>\n<\/ol>\n<h2>\u5b89\u5168\u548c\u5b58\u50a8<\/h2>\n<p>\u7531\u4e8e\u7845\u70f7\u6c14\u4f53\u7684\u9ad8\u71c3\u6027\u548c\u9ad8\u53cd\u5e94\u6027\uff0c\u5728\u4f7f\u7528\u548c\u5b58\u50a8\u8fc7\u7a0b\u4e2d\u5fc5\u987b\u975e\u5e38\u5c0f\u5fc3\u3002\u901a\u5e38\uff0c\u7845\u70f7\u6c14\u4f53\u5728\u4f4e\u538b\u548c\u4f4e\u6e29\u4e0b\u5b58\u50a8\uff0c\u5e76\u4e14\u5728\u4f7f\u7528\u65f6\u5fc5\u987b\u5728\u63a7\u5236\u826f\u597d\u7684\u73af\u5883\u4e2d\u8fdb\u884c\uff0c\u4ee5\u907f\u514d\u706b\u707e\u548c\u7206\u70b8\u7684\u98ce\u9669\u3002<\/p>\n<h2>\u603b\u7ed3<\/h2>\n<p>\u7845\u70f7\u6c14\u4f53\u5728\u534a\u5bfc\u4f53\u5236\u9020\u548c\u70ed\u5e94\u7528\u4e2d\u5177\u6709\u91cd\u8981\u7684\u89d2\u8272\u3002\u901a\u8fc7\u4e86\u89e3\u5176\u5316\u5b66\u548c\u7269\u7406\u7279\u6027\uff0c\u6211\u4eec\u53ef\u4ee5\u66f4\u597d\u5730\u5229\u7528\u5b83\u6765\u5236\u9020\u9ad8\u6548\u80fd\u7684\u7535\u5b50\u548c\u5fae\u7535\u5b50\u8bbe\u5907\u3002<\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u7845\u70f7\u6c14\u4f53\u5728\u534a\u5bfc\u4f53\u5236\u9020\u4e2d\u4f5c\u4e3a\u5173\u952e\u6750\u6599\uff0c\u5e76\u5728\u70ed\u5e94\u7528\u4e2d\u7528\u4e8e\u8584\u819c\u6c89\u79ef\uff0c\u52a9\u529b\u63d0\u5347\u5668\u4ef6\u6027\u80fd\u548c\u751f\u4ea7\u6548\u7387\u3002\u4e86\u89e3\u5176\u7279\u6027\u53ca\u5e94\u7528\u3002<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":[],"categories":[134],"tags":[],"yoast_head":"<!-- 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